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Edwards E2M275 Dual Stage Rotary Vane Pump - אס די איי סמיקונדקטור בע"מ (SDA-TECH)
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Model PN Voltage
E2M275 A36704940 208-230/440-460V, 3 Ph 60Hz
E2M275FX A36717940 208-230/440-460V, 3 Ph 60Hz
Pumping Speed 206 cfm
Ultimate Pressure without Gas Ballast 1 mTorr
Power 8.5 kW
Inlet/Outlet Size ISO63 / NW40
Weight 488 lbs.
Oil Capacity 28 liters

Edwards E2M275 Dual Stage Rotary Vane Pump