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E2M80 Dual Stage Rotary Vane Pump - אס די איי סמיקונדקטור בע"מ (SDA-TECH)
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Model PN Voltage
E2M80 A36504940 208-230/440-460V, 3 Ph 60Hz
E2M80FX A36517940 208-230/440-460V, 3 Ph 60Hz
Pumping Speed 66 cfm
Ultimate Pressure without Gas Ballast 1 mTorr
Power 3 kW
Inlet/Outlet Size ISO40
Weight 275 lbs.
Oil Capacity 6.3 liters

E2M80 Dual Stage Rotary Vane Pump