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E2M30 Dual Stage Rotary Vane Pump - אס די איי סמיקונדקטור בע"מ (SDA-TECH)
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Model PN Voltage
E2M30 A37410940 208-230/440-460V, 3 Ph 60Hz
E2M30 A37315981 110/200-210V, 1 Ph 60Hz
Pumping Speed 23 cfm
Ultimate Pressure without Gas Ballast 1 mTorr
Power .90 kW
Inlet/Outlet Size NW25 / NW25
Weight 97 lbs.
Oil Capacity 1.5 liters

 

E2M30 Dual Stage Rotary Vane Pump