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E2M28 Dual Stage Rotary Vane Pump - אס די איי סמיקונדקטור בע"מ (SDA-TECH)
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Model PN Voltage
E2M28 A37333940 208-230/440-460V, 3 Ph 60Hz
E2M28 A37315904 110/200-210V, 1 Ph 60Hz
E2M28FX A37343940 208-230/440-460V, 3 Ph 60Hz
E2M28FX A37325984 110/200-210V, 1 Ph 60Hz
Pumping Speed 22.3 cfm
Ultimate Pressure without Gas Ballast 1 mTorr
Power .90 kW
Inlet/Outlet Size NW25 / .75” BSP
Weight 97 lbs.
Oil Capacity 1.5 liters

E2M28 Dual Stage Rotary Vane Pump