The PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes.
The reactive by-products created by both PCS systems are best removed using a CLEANSORB® dry bed chemisorber. For existing installations requiring PFC removal capability, both PCS systems are readily retrofitted upstream of existing abatement systems such as central wet scrubbers.
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